Biblio

Found 2 results

2002
, , , 05/2002.
Conley, J. F., Y. Ono, W. Zhuang, D. J. Tweet, W. Gao, S. K. Mohammed, and R. Solanki, "Atomic Layer Deposition of Hafnium Oxide Using Anhydrous Hafnium Nitrate", Electrochemical and Solid-State Letters, vol. 5, issue 5, pp. C57-C59, 02/2002. Abstract