OREGON STATE UNIVERSITY

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2002
Conley, J. F., Y. Ono, W. Zhuang, D. J. Tweet, W. Gao, S. K. Mohammed, and R. Solanki, "Atomic Layer Deposition of Hafnium Oxide Using Anhydrous Hafnium Nitrate", Electrochemical and Solid-State Letters, vol. 5, issue 5, pp. C57-C59, 02/2002.