Biblio

Found 2 results

2010
, , , 10/2010.
2009
Smith, S. W., K. G. McAuliffe, and J. F. Conley, "Atomic Layer Deposited Al2O3/Ta2O5 Nanolaminate Capacitors", 2009 International Semiconductor Device Research Symposium (ISDRS), College Park, MD, IEEE, pp. 1 - 2, 12/2009. Abstract