Biblio

Found 11 results

2004
, , , 03/2004.
, , , 01/2004.
Conley, J. F., Y. Ono, D. J. Tweet, and R. Solanki, "Pulsed deposition of metal–oxide thin films using dual metal precursors", Applied Physics Letters, vol. 84, issue 3, pp. 398-400, 01/2004. Abstract
2003
, , , 01/2003.
2002
2001
Conley, J. F., Y. Ono, D. J. Tweet, W. Zhuang, M. Khaiser, and R. Solanki, "Preliminary investigation of hafnium oxide deposited via atomic layer chemical vapor deposition (ALCVD)", IEEE 2001 International Integrated Reliability Workshop (IRW), Lake Tahoe, CA, IEEE, pp. 11 - 15, 10/2001. Abstract