OREGON STATE UNIVERSITY

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Found 3 results
Filters: Keyword is sputter deposition  [Clear All Filters]
2006
Chiang, H. Q., D. Hong, C. M. Hung, R. E. Presley, J. F. Wager, C. - H. Park, D. A. Keszler, and G. S. Herman, "Thin-film transistors with amorphous indium gallium oxide channel layers", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 24, issue 6, pp. 2702, 2006.
Hong, D., H. Q. Chiang, and J. F. Wager, "Zinc tin oxide thin-film transistors via reactive sputtering using a metal target", Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 24, issue 5, pp. L23, 2006.