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The following is a partial list of tools available in the OSU Electrical Engineering fabrication facilities. Descriptions, specs, and pictures will be added shortly.
Fabrication Facilities
- Tencor AlphaStep 500 physical profilometer
- Tencor AlphaStep 100 physical profilometer
- Gaertner ellipsometer
- Filmetrics interferometer
- Filmetrics F20 thin-film measurement system
- Nanometrics NanoSpec/AFT 4000 spectrophotometric film thickness measurement system
- Ono Sokki Cl-250 non-contact thickness meter
- Auger Electron Spectroscopy (AES) system
- Scanning Electron Microscope (SEM)
Characterization Facilities
ACTFEL Electro-optic Characterization System
- Custom-built high-voltage amplifier (±300 V)
- Wavetek 395 Arbitrary waveform generator
- Tektronix TDS-420 digitizing oscilloscope
- Photo Research PR-650 Photospectrometer
- Photomultiplier tube
- Custom computer software interface
- L-V, E-V, Qmax-Vmax, Q-V, C-V, Q-fp, L(t), i(t), EL spectra
- Automated measurement, data storage/recall, and graphing
Various Equipment
- Sun Systems environmental chamber
- Coldfinger/closed cycle liquid helium refrigerator
- HP Impedance Analyzer
- HP Picoammeter
- Hall mobility measurement system
- Ultrasonic Cleaner [documentation
]
ECE Clean Room Mailing List
People who work in the clean room facilities often should subscribe to the ECE clean room mailing list. The list is for posting notices of outages, scheduled maintenance, safety issues, policy or procedure changes, etc., or for posting general questions about the clean room.
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