OREGON STATE UNIVERSITY

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Polymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold

TitlePolymeric waveguides with embedded micro-mirrors formed by Metallic Hard Mold
Publication TypeJournal Article
Year of Publication2010
AuthorsDou, X., A. X. Wang, H. Huang, X. Lin, D. Ding, D. Z. Pan, and R. T. Chen
JournalOptics Express
Volume18
Issue1
Pagination378
Date Published01/2010
Abstract

In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50µm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micro-mirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

DOI10.1364/OE.18.000378
Short TitleOpt. Express