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Accurate closed-form capacitance extraction formulas for metal fill in RFICs

TitleAccurate closed-form capacitance extraction formulas for metal fill in RFICs
Publication TypeConference Paper
Year of Publication2009
AuthorsGaskill, S. G., V. S. Shilimkar, and A. Weisshaar
Conference Name2009 IEEE Radio Frequency Integrated Circuits Symposium (RFIC)
Pagination611 - 614
Date Published06/2009
PublisherIEEE
Conference LocationBoston, MA
ISBN Number978-1-4244-3377-3
Abstract

Metal fill patterning in modern IC processes forces many floating metal structures to exist in the fabricated design. The number of these structures makes electrostatic capacitance extraction difficult and the capacitance impact may be neglected or incorrectly approximated. In this paper closed-form, semi-empirical formulas are presented for a single layer of floating metal fill between two parallel plates. The new formulas have been applied to calculating the ground capacitance of a MIM capacitor. The maximum error was less than 1% for a wide range of metal fill dimensions in a 0.18 m process.

DOI10.1109/RFIC.2009.5135616