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Flexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method

TitleFlexible polymer optical layer for board-level optical interconnects by highly durable metal imprinting method
Publication TypeConference Paper
Year of Publication2010
AuthorsWang, A. X., X. Dou, X. Lin, and R. T. Chen
Conference NameOptoelectronic Interconnects and Component Integration IX
Pagination76070R - 76070R-7
Date Published01/2010
PublisherSPIE
Conference LocationSan Francisco, California
Abstract

In this paper, we presented fabrication of nickel based metal mold with 45° tilted surfaces on both ends of the channel waveguide through electroplating process. To obtain a precise 45° tilted angle, a 50μm thick SU-8 layer was UV exposed under de-ionized water, with repeatable error control of 0.5°. The polymeric waveguide array with 45° micromirrors, which is formed by a UV imprinting method with the fabricated metallic mold, shows total insertion losses around 4dB, propagation loss around 0.18dB/cm and 75% coupling efficiency.

DOI10.1117/12.841173