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Ultra-compact silicon nanophotonic modulator based on electro-optic polymer infiltrated slot photonic crystal waveguide

TitleUltra-compact silicon nanophotonic modulator based on electro-optic polymer infiltrated slot photonic crystal waveguide
Publication TypeConference Paper
Year of Publication2010
AuthorsLin, C-Y., B S. Lee, A. X. Wang, W-C. Lai, S. Chakravarty, Y. Liu, D. Kwong, R. T. Chen, J. Luo, and A. K. - Y. Jen
Conference NameOptoelectronic Interconnects and Component Integration IX
Pagination76070D - 76070D-8
Date Published01/2010
PublisherSPIE
Conference LocationSan Francisco, California
Abstract

We experimentally demonstrate a Mach-Zehnder modulator based on electro-optic (EO) polymer (AJ-CKL1/PMMA) infiltrated photonic crystal slot waveguide. The modulator design combines the advantage of excellent optical confinement in silicon slot waveguide, slow light enhancement in photonic crystal waveguide, and strong electro-optical response in EO polymer. This design allows us to achieve electro-optic modulation in active region only 352μm long. Matching the mode profile and group velocity between strip and photonic crystal slot waveguide enables coupling into slow light regime. The modulator shows a 22V switching voltage and an improved in-device EO coefficient of 51pm/V as compared to recently reported value.

DOI10.1117/12.843884