OREGON STATE UNIVERSITY

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Nickel electroplating for nanostructure mold fabrication.

TitleNickel electroplating for nanostructure mold fabrication.
Publication TypeJournal Article
Year of Publication2011
AuthorsLin, X., X. Dou, A. X. Wang, and R. T. Chen
JournalJournal of nanoscience and nanotechnology
Volume11
Issue8
Pagination7006-10
Date Published08/2011
ISSN1533-4880
Abstract

We demonstrated a practical process of fabricating nickel molds for nanoimprinting. Dual-side polished glass is chosen as the substrate on which nickel nanostructures are successfully electroplated. Photonic crystal structures with 242 nm diameters and other nanoscale pillars down to 9 nm diameters are achieved over a large area. The electroplating parameters are investigated and optimized. This process extends the feasibility of electroplating process to nanoscale and shows great potential in nanoimprint mold fabrication with its low cost, straightforward process and controllable pattern structures.

Alternate JournalJ Nanosci Nanotechnol
PubMed ID22103113