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Reduced surface roughness with improved imprinting technique for polymer optical components

TitleReduced surface roughness with improved imprinting technique for polymer optical components
Publication TypeConference Paper
Year of Publication2012
AuthorsLin, X., A. Hosseini, A. X. Wang, and R. T. Chen
Conference NameIEEE Photonics Conference (IPC 2012)
Pagination280 - 281
Date Published09/2012
PublisherIEEE
Conference LocationBurlingame, CA
ISBN Number978-1-4577-0732-2
Abstract

We demonstrate a molding process to imprint optical components on polymer. The hard mold is fabricated by either evaporation or electroplating. The roughness of molded polymer surface is reduced by 5nm compared to those fabricated by ion-etching.

DOI10.1109/IPCon.2012.6358601