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Functionalization and Environmental Stabilization of ZnO Nanobridge Sensors Fabricated using Carbonized Photoresist

TitleFunctionalization and Environmental Stabilization of ZnO Nanobridge Sensors Fabricated using Carbonized Photoresist
Publication TypeJournal Article
Year of Publication2011
AuthorsMason, A. D., C-C. Huang, M. T. Koesdjojo, N. D. Stephon, V. T. Remcho, and J. F. Conley
JournalMRS Proceedings
Volume1350
Date Published01/2011
Abstract

ZnO nanobridge sensors were selectively grown and electrically connected using lithographically patterned carbonized photoresist (C-PR). As ZnO is known to dissolve in deionized (DI) water, parylene-A was investigated as a moisture barrier and potential functionalization platform. A chemical vapor deposition (CVD) process for parylene-A was developed and it was demonstrated that parylene-A coated ZnO NWs do not show any signs of dissolution after 24 hours in an aqueous solution. The impact of the parylene-A coating on the electrical performance and sensitivity of ZnO nanobridge devices was investigated. A comparison of UV, O₂, and H₂O sensitivity between uncoated and coated devices revealed that a thin coating of parylene-A attenuated all of these responses, suggesting the ability to modulate environmental sensitivity using this non-covalently bound polymer passivation layer.

DOI10.1557/opl.2011.1334
Short TitleMRS Proc.