OREGON STATE UNIVERSITY

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Pulsed Deposition of HfO2 using Hf(NO3)4 as an Oxidizing Agent for HfCl4

TitlePulsed Deposition of HfO2 using Hf(NO3)4 as an Oxidizing Agent for HfCl4
Publication TypeConference Paper
Year of Publication2003
AuthorsConley, J. F., Y. Ono, and R. Solanki
Conference NameMRS Proceedings
Pagination91-96
Date Published04/2003