Amorphous Metal/Oxide Nanolaminate

TitleAmorphous Metal/Oxide Nanolaminate
Publication TypeJournal Article
Year of Publication2010
AuthorsCowell, III, W. E., C. C. Knutson, J. F. Wager, and D. A. Keszler
JournalACS Applied Materials & Interfaces
Volume2
Issue7
Pagination1811 - 1813
Date Published07/2010
ISSN1944-8252
Keywordsamorphous metal, interface, nanolaminate, oxide, thin films, XPS
Abstract

Bilayers of sputtered amorphous multicomponent metal films (AMMFs) and solution deposited amorphous oxide films have been reproducibly deposited with varying thicknesses of 20, 25, and 30 nm to form ordered nanolaminates. Interdiffusion is observed at the AMMF-oxide boundary, leading to unique interface chemistries that are dictated by the nature and order of the deposition processes.

DOI10.1021/am100283m
Short TitleACS Appl. Mater. Interfaces