OREGON STATE UNIVERSITY

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Low-Temperature Thin-Film Deposition and Crystallization

TitleLow-Temperature Thin-Film Deposition and Crystallization
Publication TypeJournal Article
Year of Publication2002
AuthorsPark, S., B. L. Clark, D. A. Keszler, J. P. Bender, J. F. Wager, T. A. Reynolds, and G. S. Herman
JournalScience
Volume297
Issue5578
Pagination65 - 65
Date Published07/2002
ISSN10959203
DOI10.1126/science.1072009