OSU Materials and Devices Research Group Homepage

Facilities

The following is a partial list of tools available in the OSU Electrical Engineering fabrication facilities.

Fabrication Facilities

	Tasker-Chiang DC/RF magnetron sputtering system Features: Fully automated control with the linear substrate translator Three 2" guns and two 3" guns installed Substrate heater capable of up to 300 ºC Maglev turbo molecular pump Load lock chamber Documents: User's guide Operation Manual Programmer's reference Turbo pump user's manual
	AJA RF magnetron sputtering system Features: Five 2" guns installed Rotational substrate holder with heater and RF power supply Maglev turbo molecular pump Load lock chamber with maglev turbo molecular pump Documents: Will be uploaded soon
	Electron beam evaporation / sputter desposition system Features: Fully automated control Substrate heater Two 2" guns installed Maglev turbo molecular pump Load lock chamber with turbo molecular pump Documents: Will be uploaded soon
	CPA RF magnetron sputtering system Features: One 2" and one 3" guns installed Load lock chamber Documents: Operation manual User's guide
	Glove box Features: Dehydration oven capable of up to ~600 ºC Thermal evaporator installed Documents: Operation manual Technical manual Cryopump Troubleshooting Chemical inventory
	Reactive ion etching (RIE) system Features: Patially automated control Turbo molesular pump Documents: Operation manual
	Plasma-enhanced chemical vapor deposition (PE-CVD) system Features: - Documents: N/A
	Polaron thermal evaporation system Features: Desktop thermal evaporator exclusively used for aluminum contact deposition Documents: Operation manual
	Rapid thermal anneal (RTA) system Features: Quartz chamber with halogen lamps Capable of increasing temperature up to 1200 ºC Documents: Operation manual User's guide
	Neytech furnace Features: Vacuum sealed chamberwith the forming gas introduction capabilities Documents: N/A
	Eurotherm 47900 box furnace Features: Small box furnace with the Eurotherm temperature controller Documents: User's guide (47900/62700)
	Eurotherm 62700 box furnace Features: Large box furnace with the Eurotherm temperature controller Documents: User's guide (47900/62700)
	Probestation and semiconductor parameter analyzer Features: Probe station with the semiconductor parameter analyzer Agilent 4155/4156C LED light source (410nm, 535nm, and 635nm) Stage heater with controller (45 - 200 ºC) Documents: Agilent 4155/4156C User's GuideVol.1 and Vol.2 Agilent 4155/4156C programmer's guide Agilent 4155/4156C measurement and analysis Agilent 4155/4156C smple application program guide book
	Tencor AlphaStep 100 profilometer Features: Tungsten stylus-based thin film relative thickness profiler Documents: N/A

Various other facilities

• Sun Systems environmental chamber
• Coldfinger/closed cycle liquid helium refrigerator
• HP Impedance Analyzer
• HP Picoammeter
• Hall mobility measurement system
• Ultrasonic Cleaner

ECE Clean Room Mailing List

People who work in the clean room facilities often should subscribe to the ECE clean room mailing list. The list is for posting notices of outages, scheduled maintenance, safety issues, policy or procedure changes, etc., or for posting general questions about the clean room.

Site Menu

• HOME
• Online Publications and Theses
• Research Team
• Current Projects
• Facilities
• Relevant Links
• Group Alumni

Information

• About us
• Contact us