Facilities

Facilities

The following is a partial list of tools available in the OSU Electrical Engineering fabrication facilities.

Fabrication Facilities

Tang

Tasker-Chiang DC/RF magnetron sputtering system

Features:

Fully automated control with the linear substrate translator
Three 2" guns and two 3" guns installed
Substrate heater capable of up to 300 ºC
Maglev turbo molecular pump
Load lock chamber

Documents:

User's guide
Operation Manual
Programmer's reference
Turbo pump user's manual

AJA

AJA RF magnetron sputtering system

Features:

Five 2" guns installed
Rotational substrate holder with heater and RF power supply
Maglev turbo molecular pump
Load lock chamber with maglev turbo molecular pump

Documents:

Will be uploaded soon

e beam

Electron beam evaporation / sputter desposition system

Features:

Fully automated control
Substrate heater
Two 2" guns installed
Maglev turbo molecular pump
Load lock chamber with turbo molecular pump

Documents:

Will be uploaded soon

CPA

CPA RF magnetron sputtering system

Features:

One 2" and one 3" guns installed
Load lock chamber

Documents:

Operation manual
User's guide

Glove box

Glove box

Features:

Dehydration oven capable of up to ~600 ºC
Thermal evaporator installed

Documents:

Operation manual
Technical manual
Cryopump Troubleshooting
Chemical inventory

RIE

Reactive ion etching (RIE) system

Features:

Patially automated control
Turbo molesular pump

Documents:

Operation manual

CVD

Plasma-enhanced chemical vapor deposition (PE-CVD) system

Features:

-

Documents:

N/A

Polaron

Polaron thermal evaporation system

Features:

Desktop thermal evaporator exclusively used for aluminum contact deposition

Documents:

Operation manual

RTA

Rapid thermal anneal (RTA) system

Features:

Quartz chamber with halogen lamps
Capable of increasing temperature up to 1200 ºC

Documents:

Operation manual
User's guide

Neytech

Neytech furnace

Features:

Vacuum sealed chamberwith the forming gas introduction capabilities

Documents:

N/A

47900 Furnace

Eurotherm 47900 box furnace

Features:

Small box furnace with the Eurotherm temperature controller

Documents:

User's guide (47900/62700)

62700 Furnace

Eurotherm 62700 box furnace

Features:

Large box furnace with the Eurotherm temperature controller

Documents:

User's guide (47900/62700)

Probestation

Probestation and semiconductor parameter analyzer

Features:

Probe station with the semiconductor parameter analyzer Agilent 4155/4156C
LED light source (410nm, 535nm, and 635nm)
Stage heater with controller (45 - 200 ºC)

Documents:

Agilent 4155/4156C User's GuideVol.1 and Vol.2
Agilent 4155/4156C programmer's guide
Agilent 4155/4156C measurement and analysis
Agilent 4155/4156C smple application program guide book

Profilometer

Tencor AlphaStep 100 profilometer

Features:

Tungsten stylus-based thin film relative thickness profiler

Documents:

N/A

Various other facilities

ECE Clean Room Mailing List

People who work in the clean room facilities often should subscribe to the ECE clean room mailing list. The list is for posting notices of outages, scheduled maintenance, safety issues, policy or procedure changes, etc., or for posting general questions about the clean room.

School of Electrical Engineering and Computer Science, Oregon State University
1148 Kelley Engineering Center, Corvallis, OR 97331-5501
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