OREGON STATE UNIVERSITY

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Solution-Processed Aluminum Oxide Phosphate Thin-Film Dielectrics

TitleSolution-Processed Aluminum Oxide Phosphate Thin-Film Dielectrics
Publication TypeJournal Article
Year of Publication2007
AuthorsMeyers, S. T., J. T. Anderson, D. Hong, C. M. Hung, J. F. Wager, and D. A. Keszler
JournalChemistry of Materials
Volume19
Issue16
Pagination4023 - 4029
Date Published08/2007
ISSN1520-5002
DOI10.1021/cm0702619
Short TitleChem. Mater.